Microdants and microsystems. Tutorial. Gridchin A.V.

The designs and principles of the main types of microdathers and microsystems, developed and used at present are presented. Definitions are given to the main terms used in a microsystem technique. A list of metrological parameters characterizing the microsystem as a measuring device is given. A separate issue considered computer modeling and design of microsystems based on the ANSYS software package.

for students studying in training programs 12.04.01 “Instrumentation” and on 03/28/01 “Nanotechnology and microsystem technology”.